氣體名稱 | 平衡氣 | 濃度范圍 | 平衡氣 | 濃度范圍 |
NH3 | H2 | 50ppm-1.5% | N2 | 50ppm-50% |
CO2 | Air | 0.1-30%;100-999ppm;1-99ppm | N2 | 0.1-30%;100-999ppm;1-99ppm |
H2 | 0.1-30%;100-999ppm;1-99ppm | O2 | 0.1-30%;100-999ppm;1-99ppm |
CO | Air | 0.1-6.0%;50-999ppm;1-49ppm | N2 | 0.1-50%;50-999ppm;1-49ppm |
H2 | 0.1-50%;50-999ppm;1-49ppm | | |
C2H6 | Air | 0.1-50%;50-999ppm;5-49ppm | N2 | 0.1-50%;50-999ppm;1-49ppm |
C2H4 | Air | 0.1-50%;50-999ppm;5-49ppm | N2 | 0.1-4.5%;50-999ppm;5-49ppm |
H2 | Ar | 0.1-50%;50-999ppm;1-49ppm | N2 | 0.1-50%;50-999ppm;1-49ppm |
He | 0.1-50%;50-999ppm | |
H2S | He | 0.1-3%;50-999ppm;10-49ppm | N2 | 0.1-5%;50-999ppm;10-49ppm |
i-C4H10 | He | 0.1-2%;50-999ppm;5-49ppm | N2 | 0.1-2%;50-999ppm;5-49ppm |
CH4 | Air | 0.1-2.65%;50-999ppm;1-49ppm | H2 | 0.1-50%;50-999ppm;1-49ppm |
Ar | 0.1-50%;50-999ppm;1-49ppm | N2 | 0.1-50%;50-999ppm;1-49ppm |
NO | N2 | 0.1-1.0%;50-999ppm;5-49ppm | | |
N2 | Ar | 0.1-50%;50-999ppm;2-49ppm | He | 0.1-50%;50-999ppm;2-49ppm |
O2 | Ar | 0.1-50%;100-999ppm;5-49ppm | | |
NO2 | He | 0.1-0.7%;50-999ppm;10-49ppm | N2 | 0.1-0.7%;50-999ppm;10-49ppm |
C3H8 | Air | 0.1-1.0%;50-999ppm;5-49ppm | N2 | 0.1-3.0;50-999ppm;5-49ppm |
SO2 | N2 | 0.1-0.5%;50-999ppm;5-49ppm | | |
SF6 | N2 | 0.1-0.5%;50-999ppm;5-49ppm | | |