好處
典型應用
新聞
現(xiàn)在提供 EtherCAT 數字接口!
規(guī)格
類型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar | |
---|---|---|---|---|
精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
溫度效應 | ||||
零點 | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
滿量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
壓力,大 | kPa (absolute) | 400 | 260 | 130 |
分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
低讀數 | percent FS | 0.01 | 0.01 | 0.01 |
建議的低讀數 | percent FS | 0.05 | 0.05 | 0.05 |
建議的低控制壓力 | percent FS | 0.5 | 0.5 | 0.5 |
溫度 | ||||
運行(周圍環(huán)境)(5) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
在法蘭處烘烤 | °C | ≤110 | ≤110 | ≤110 |
貯存 | °C | –20 … +65 | –20 … +65 | –20 … +65 |
電源電壓 | +14 … +30 VDC or±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
功耗 | ||||
加熱時 | W | ≤15 | ≤15 | ≤15 |
運行溫度 | W | ≤10 | ≤10 | ≤10 |
輸出信號(模擬) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
反應時間 (2) | ms | 30 | 30 | 130 / 30 (3) |
保護等級 | IP 40 | IP 40 | IP 40 | |
標準 | ||||
CE 合規(guī) | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | |
ETL 認證 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | |
SEMI 合規(guī) (5) | SEMI S2 | SEMI S2 | SEMI S2 | |
電氣連接 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
設定點 | ||||
設定點數量 | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
繼電器觸點 | ≤30 | ≤30 | ≤30 | |
滯后 | percent FS | 1 | 1 | 1 |
診斷端口 | ||||
協(xié)議 | RS232-C | RS232-C | RS232-C | |
讀數 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
設置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
內部容積 | ||||
內部容積 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內部容積 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內部容積 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內部容積 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
重量 | ||||
重量 1/2'' 管 | g | 837 | 837 | 837 |
重量 DN 16 ISO KF | g | 852 | 852 | 852 |
重量 DN 16 CF-R | g | 875 | 875 | 875 |
重量 8 VCR® | g | 897 | 897 | 897 |
EtherCAT | ||||
協(xié)議 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
通訊標準 | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | |
節(jié)點地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
物理層 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
數字功能設置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
(CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
過程數據 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
EtherCAT 連接器 | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | |
電纜 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
Signal processing time | ms | 2 | 2 | 2 |
Profinet | ||||
Communication protocol | protocol specalized for Profinet | protocol specalized for Profinet | protocol specalized for Profinet | |
Data rate | 100 Mbps | 100 Mbps | 100 Mbps | |
Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
Digital functions read | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
Profinet connector | 2 x RJ45, 8-pin (socket), input & output | 2 x RJ45, 8-pin (socket), input & output | 2 x RJ45, 8-pin (socket), input & output | |
Profinet Cable | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) | |
Cable lenght | <100 m (330 ft) | <100 m (330 ft) | <100 m (330 ft) | |
DeviceNet™ | ||||
協(xié)議 | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | |
數據率 | kBaud | |||
電纜長度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
電纜長度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
電纜長度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
MAC ID | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | |
數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
數字功能設置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
技術規(guī)格 | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | |
設備類型 | ''VG'' vacuum gauge | ''VG'' vacuum gauge | ''VG'' vacuum gauge | |
I / O 從屬傳訊 | polling only | polling only | polling only | |
真空計 D 型連接器的電源電壓 | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | |
為微型連接器上的 DeviceNet 收發(fā)器提供電壓 | 24 V nom / <2 w="" (11="" …="" 25="">2> | 24 V nom / <2 w="" (11="" …="" 25="">2> | 24 V nom / <2 w="" (11="" …="" 25="">2> | |
DeviceNet™ 連接器 | microstyle, 5 pin, male | microstyle, 5 pin, male | microstyle, 5 pin, male | |
CDG(模擬輸出、CDG 電源電壓、設定點)連接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
Profibus DP | ||||
波特率 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | |
地址 | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | |
數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
數字功能設置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
Profibus DP 連接器 | D-sub, 9 pin, female | D-sub, 9 pin, female | D-sub, 9 pin, female | |
CDG(模擬輸出、電源電壓、設定點)連接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male |
(1) 非線性,遲滯,在 25 °C 環(huán)境工作溫度中的可重復性,2 小時工作后無溫度影響。
(2) 提高 10 … 90 % FS
(3) 僅用于壓力控制類型
(4) 18% 鉻,10% 鎳,3% 鉬,69% 鐵
(5) 環(huán)境溫度 > 40°C 可能會使表面溫度升高到 SEMI S2 合規(guī)水平以上。
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