| 類型 | 1000 Torr | 100 ... 1 Torr | 100mTorr |
| 精度 (1) | % of reading | 0.025 | 0.025 | 0.05 |
| 溫度效應(yīng) | | | |
| 零點 | percent FS/°C | 0.0005 | 0.0005 | 0.005 |
| 滿量程 | % of reading / °C | 0.001 | 0.001 | 0.01 |
| 壓力，大 | bar (absolute) | 3 | 2.5 | 1.5 |
| 低讀數(shù) | percent FS | 0.01 | 0.01 | 0.01 |
| 建議的低讀數(shù) | percent FS | 0.05 | 0.05 | 0.05 |
| 溫度 | | | |
| 運行（環(huán)境） | °C | +10 … +40 | +10 … +40 | +10 … +40 |
| 貯存 | °C | –10 … +50 | –10 … +50 | –10 … +50 |
| 電源電壓 | | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) |
| 功耗 | | | |
| 加熱時 | W | ≤15 | ≤15 | ≤12 |
| 運行溫度 | W | ≤10 | ≤10 | ≤8 |
| 輸出信號（模擬） | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| 反應(yīng)時間 (2) | ms | 100 | 100 | 100 |
| 保護等級 | | IP 40 | IP 40 | IP 40 |
| 標(biāo)準(zhǔn) | | | |
| CE 合規(guī) | | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS |
| ETL 認(rèn)證 | | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 |
| SEMI 合規(guī) | | SEMI S2 | SEMI S2 | SEMI S2 |
| 電氣連接 | | D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC | D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC | D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC |
| 設(shè)定點 | | | |
| 設(shè)定點數(shù)量 | | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) |
| 繼電器觸點 | | ≤30 | ≤30 | ≤30 |
| 滯后 | percent FS | 1 | 1 | 1 |
| 診斷端口 | | | |
| 協(xié)議 | | Web pages, REST services, RS232-ASCII | Web pages, REST services, RS232-ASCII | Web pages, REST services, RS232-ASCII |
| 讀數(shù) | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
| 設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
| 暴露于真空的材料 | | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) |
| 內(nèi)部容積 | | | |
| 內(nèi)部容積 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內(nèi)部容積 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | | | |
| 重量 DN 16 ISO KF | g | 1670 | 1670 | 1670 |
| 重量 DN 16 CF-R | g | 1670 | 1670 | 1670 |
| 重量 8 VCR® | g | 1670 | 1670 | 1670 |
