類型 | Guardian EIES Controller |
傳感器 | |
工作壓力 | | <>-4 Torr |
溫度 | | 450° C maximum during operation and/or bakeout |
尺寸(近似) | | 0.75 in. x 1.25 in. x 1.75 in. (19 mm x 32 mm x 45 mm) |
絲極壽命(典型值) | | ~1000 hours at 2mA emission (Yttria), 4mA for Thoria |
傳感器饋入件連桿 | | Rigid ss tube, adjustable from 7 in. to 22 in. (175 mm to 550 mm) |
饋入件 / 法蘭 | | One optical and four electrical feedthroughs on 2.75 in.CF (NW35CF) |
檢測器 | |
光電倍增管 (PMT) | | Hamamatsu R7518 or equivalent |
光譜響應(yīng) | | 185 to 730 nm |
檢測限值 | | Better than 5 fW of optical input power |
PMT 增益 | | 103 to 107 (detectors are independently adjustable) |
輸出分辨率 | | 20-bit |
光入射口 | | Built-in filter holder, for filters up to 1 in. (25mm) diameter and 0.2 in. (5mm) thick |
尺寸 | | 2 in. x 5.5 in. x 2.75 in. (50 mm x 140 mm x 70 mm) mounting holes on three sides (optional mounting brackets available) |
控制器 | |
傳感器 | | 016-600-G22: Standard Sensor Assembly 22 in. 016-601-G22: Gas Compensating Sensor Assembly 22 in. |
檢測器 | | Eight optical detector channels |
控制輸出 | | Eight source control outputs, 0 to ±10 VDC programmable |
數(shù)字 I/O | | 12 relay outputs and 12 logic inputs |
功率 | | 100-240 VAC, 50/60Hz, 150W |
尺寸 | | 19 in. x 3.5 in. x 12 in. (483 mm x 89 mm x 305 mm) |
合規(guī)性 | | CE |
用戶界面軟件: | | Windows®-based setup program included with Controller |
軟件顯示沉積速率: | | 4-digit numeric display of all channels, from 0.001 to 9999 ?/s, and graphical X-Y scrolling plot with selectable scales. |
軟件顯示厚度: | | 4-digit numeric display with range selection, from 0.001 to 9999 K? |
用戶自備計算機(jī): | | Any PC with Windows® Vista/XP/2000 operating system, and Ethernet or RS-232 interface |